For oil-sealed mechanical pumps for
semiconductor processes where pumped gases react rapidly
with conventional pump oils. Halocarbon oils are the primary
lubricants in processes using pure oxygen and other strong
oxidizing agents.
- Mechanical pumps may require heaters for starting.
- Pumps operated with conventional oils must be thoroughly
cleaned before using Halocarbon.
Viscosity: Approx. 580 SSU @ 100° F.
Vapor Pressure: 0.007 Torr @ 73° C. |